Principal Investigator:
Prof. Rong ZHANG
ndrzhang@nju.edu.cn
Research Content & Progress:
Based on the aim of designing extended vertical HVPE system, a new extended vertical HVPE system has been successfully fabricated. The design requirements have been reached after debugging. Many key problems were solved in the extended HVPE system. The condition and technology of self-peeling technology were investigated and optimized. Two inch free standing GaN thick film with good quality was obtained, which shows that we take the lead in successfully obtaining two-inch free-standing thick
GaN film in homeland. The achievement reaches the international advanced level.
